書誌事項
- タイトル別名
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- Fabrication of Metal Micropattern on Self-Assembled Monolayer by Site-Selective Electroless Plating and Pattern Transfer onto Polymer Sheet
- ジコ ソシキカタンブンシ マク オ リヨウ シタ センタクテキ ムデンカイメッキ ニ ヨル キンゾク パターン ノ サクセイ ト ポリマー ジョウ エ ノ テンシャ
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説明
We prepared a self-assembled monolayer (SAM) from p-aminophenyltrimethoxysilane (APhS : NH2C6H10Si(OCH3)3) on Si substrate through chemical vapor deposition. The microstructured APhS-SAM/SiOx template onto Si substrate was fabricated by conventional vacuum ultraviolet lithography. Pd was selectively immobilized on regions of APhS-SAM as a catalyst for electroless Cu plating. The pH of the Pd solution was optimized by measuring the amount of deposited Pd obtained by X-ray photoelectron spectroscopy. At the pH values of 5 and 6, the amount of deposited Pd on the APhS-SAM increased. A Pd micropattern was prepared on the microstructured APhS-SAM from the solution. Cu was site-selectively deposited onto the microstructured Pd regions. The obtained Cu micropattern was transferred onto a Nafion® sheet by nanoimprint lithography. The shape of Cu micropattern on the sheets was observed to be the same as it is on the silicon substrate.<br>
収録刊行物
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- 表面技術
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表面技術 56 (2), 113-117, 2005
一般社団法人 表面技術協会
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詳細情報 詳細情報について
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- CRID
- 1390001204117687936
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- NII論文ID
- 10014478439
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- NII書誌ID
- AN1005202X
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- COI
- 1:CAS:528:DC%2BD2MXisFWltLo%3D
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- ISSN
- 18843409
- 09151869
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- NDL書誌ID
- 7276242
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- 本文言語コード
- ja
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- 資料種別
- journal article
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- データソース種別
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- JaLC
- NDLサーチ
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可
