Influence of Monomer Sequence of Binder Polymers for Lithographic Property of Photodefinable Nanocomposites
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- Murakami Yasuharu
- Telecommunication Materials Development Center, Hitachi Chemical Co., Ltd., Tsukuba Research Laboratory
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The relationship of binder polymer compositions and lithographic properties was examined and following conclusions were obtained; (1) The alternating sequence of binder polymer is preferable to the nanocomposite of excellent transparency. (2) The moiety of methacrylic acid is necessary to be 50% or more for the residue-free patterning. (3) Photo-definable nanocomposite composed of alternating copolymer and nano titania gives a patternable nanocomposite with high refractive index.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 27 (4), 539-544, 2014
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詳細情報 詳細情報について
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- CRID
- 1390001204325024768
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- NII論文ID
- 130004687625
- 40020133396
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- NII書誌ID
- AA11576862
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 025604570
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可