Preparation of Nanopatterned Polyimide by Imprinting and Curing Phenylethynyl- terminated Imide Oligomer
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- Ogino Masahiko
- Hitachi Research Laboratory, Hitachi, Ltd.
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- Ohashi Tatsuya
- Hitachi Research Laboratory, Hitachi, Ltd.
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- Yoshida Hirofumi
- Hitachi Research Laboratory, Hitachi, Ltd.
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- Nagayama Daigo
- Department of Biomolecular Functional Engineering, Ibaraki University
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- Kubota Toshio
- Department of Biomolecular Functional Engineering, Ibaraki University
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- Morikawa Atsushi
- Department of Biomolecular Functional Engineering, Ibaraki University
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- Ono Katsumichi
- Department of Biomolecular Functional Engineering, Ibaraki University
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抄録
Addition-type phenylethynyl-terminated imide oligomers were synthesized from 4,4’-diaminodiphenyl ether(ODA), 4-phenylethynylphthalic anhydride (PEPA) and 3,3’,4,4’-biphenyltetracarboxylic dianhydride (BPDA) or 4,4’-hexafluoroisopropylidene)- dianhydrid (6FDA), and preparation of nanopatterned polyimide was examined by imprinting the melted phenylethynyl-terminated imide oligomer and crosslinking the ethynyl groups. Crosslinked polyimide films were prepared by pressing the melted phenylethynyl-terminated imide oligomers and curing them under pressure at 370 °C afterward, and the properties of the polyimide films were studied for comparison. The crosslnked polyimide films had high glass transition temperature (Tg) above 320 °C, and showed excellent tensile strength more than 100 MPa. Nanopatterned polyimide was prepared by imprinting the melted imide oligomer with a metal mold and curing it under pressure at 370 °C afterward. ZEONOR(R) film could be imprinted using the imprinted and cured imide oligomer as sub-mold instead of the metal mold.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 27 (2), 155-160, 2014
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詳細情報 詳細情報について
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- CRID
- 1390001204325846400
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- NII論文ID
- 130004678331
- 40020133024
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- NII書誌ID
- AA11576862
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 025604144
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可