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- 小林 一三
- 日本酸素株式会社つくば研究所
書誌事項
- タイトル別名
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- Properties of High Purity Pb(dpm), As MOCVD Material
- Properties of High Purity Pb(dpm)2 As MOCVD Material.
抄録
In order to replace Pb (C2H5)4, which is highly toxic, bis(2, 2, 6, 6-tetramethyl-3, 5-heptanedionato)lead( II ), Pb(dpm)2 was syntesized as a new source material for preparation of ferroelectric thin filme by MOCVD. Pb(dpm)2 was characterized with ICP, elemental analysis, TG-DTA, FT-IR, 11-I-NMR, and 13C-NMR. Vaporization of Pb (dpm)2 started at 105°C as the temperature was raised and steep weight loss was observed in the range of 200 to 280 °C. The vaporization of impurities was not found in TG-DTA. The vaporization completed below 300 °C without residue. Pb (dpm)2 proved to be superior in volatility and purity for the MOCVD source material.
収録刊行物
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- 日本化学会誌（化学と工業化学）
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日本化学会誌（化学と工業化学） 1992 (8), 881-884, 1992-08-10
公益社団法人 日本化学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390001204390153728
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- NII論文ID
- 130004159935
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- ISSN
- 21850925
- 03694577
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可