An Optical Distance sensor Fabricated by Micromachining Technology

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  • Oka Toru
    Mitsubishi Electric Corp. Advanced Technology R&D Center
  • Nakajima Hajime
    Mitsubishi Electric Corp. Advanced Technology R&D Center
  • Nakashima Toshiro
    Mitsubishi Electric Corp. Advanced Technology R&D Center
  • Kiyono Satoshi
    Tohoku Univ. School of Engineering, Dept. of Nanomechanics
  • Hollenbach Uwe
    Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology
  • Wallrabe Ulrike
    Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology
  • Mohr Jürgen
    Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology

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Other Title
  • マイクロマシニング技術を用いた光学式距離センサ
  • マイクロマシニング ギジュツ オ モチイタ コウガクシキ キョリ センサ

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Description

A micro-optical distance sensor by a combination of LIGA technology and Si micromachining is proposed. The function of the distance sensor is based on the triangulation principle. This sensor consists of optical components made by the LIGA process, i.e. a free space micro-optical system and micro-cylindrical lenses, and an electrical base with opto-electrical devices.<br>In this paper, two prototype sensors are described, which have measurement ranges of 1 mm (Type1) and 10mm (Type2). The dimensions of the pure sensor chip are 7 mm (W) × 7 mm (L) × 3 mm (H). The repeatability error of Type1 and Type2 are ±3 μm and ±80 μm, respectively.

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