エアロゾル充填によるセンサ用マイクロ熱電変換素子の高熱抵抗化

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  • Micro Thermoelectric Generators Having High Thermal-Resistance for Wireless Sensor Nodes Made by Aerosol Mold-Filling
  • エアロゾル ジュウテン ニ ヨル センサヨウ マイクロ ネツデンヘンカン ソシ ノ コウネツ テイコウカ

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A high output voltage micro thermoelectric generator (µTEG) has been developed by fabricating thermocouples having a high aspect ratio with a high integration density. They have been made by a novel and simple fabrication method, in which thermoelectric nanopowders are filled in a photosensitive glass mold by using aerosol deposition (ASD). This method has a possibility to increase the aspect ratio of thermocouples drastically while increasing their toughness and increasing their thermal resistance. We have fabricated thermocouples with an aspect ratio of 3.3 and a high integration density of 620 TCs/cm2. Their Seebeck coefficient and electrical resistivity are 290 µV/K and 1.5 mΩcm, respectively. The µTEG reaches a thermal resistance of 3.6 K/W·cm2, output voltage efficiency of 0.18 V/K/cm2, and output power efficiency of 18 µW/K2/cm2. These HAR thermocouples have an advantage for energy harvesting from a human body because they can result in a high temperature difference because of their high thermal resistance.

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