書誌事項
- タイトル別名
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- UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass
- エマルジョングレイスケールマスク ノ シガイセン トウカリョウ ト カンコウセイ ガラス ノ 3ジゲン カコウ
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説明
Emulsion gray-scale masks were fabricated using three types of ink-jet printers and a 1/20 projector. Scanner was used to measure the light transparency of the printed transparency sheets and emulsion gray-scale mask. Power of UV light was measured with UV power meter especially for the wavelength of 313[nm] in which photosensitive glass absorbs well. The UV light transparency of emulsion gray-scale mask was measured with UV power meter, and the effect for the etching depth of photo sensitive glass was discussed in this paper. Then, photosensitive glass was processed by the mask and deep UV light source, and the relationship between etching depth and gray-scale value was measured. From the result, characteristics emulsion gray-scale mask of were unveiled for 3-D micro machining of photosensitive glass.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 123 (11), 499-503, 2003
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460630016
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- NII論文ID
- 10012557500
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 6750996
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDLサーチ
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