書誌事項
- タイトル別名
-
- Development of Electrostatic Actuator for Ohmic-Contact RF MEMS Switch/Relay
- ユウセッテン RF MEMS スイッチ リレーヨウ セイデンクドウ アクチュエータ ノ カイハツ
この論文をさがす
説明
A compact switch/relay with excellent high frequency performance at around 2GHz is developed by adopting a novel non-linear spring structure and high frequency signal line structure.<br>The non-linear spring system applied to an electrostatic actuator of RF MEMS switch/relay increases restoration force for switching reliability. The maximum restoration force can be three times higher than that of a linear spring system actuator. No failure due to restoration force shortage is observed during switching test up to 100 million cycles. The present RF MEMS switch/relay has been shown competitive RF performance over conventional RF switches such as PIN diodes and GaAs MMIC both by the experimental results.
収録刊行物
-
- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
-
電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (2), 65-71, 2006
一般社団法人 電気学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001204460731904
-
- NII論文ID
- 10017256420
- 30011530943
-
- NII書誌ID
- AN1052634X
-
- ISSN
- 13475525
- 13418939
-
- NDL書誌ID
- 7818679
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDLサーチ
- Crossref
- CiNii Articles
- OpenAIRE
-
- 抄録ライセンスフラグ
- 使用不可
