Development of Low-Temperature Crystallization Process for TiNi Alloy Film by Sputtering Deposition Simultaneously with Ion Irradiation
-
- Ikenaga Noriaki
- Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology
-
- Sakudo Noriyuki
- College of Engineering, Kanazawa Institute of Technology
Bibliographic Information
- Other Title
-
- イオン照射とスパッタリングの同時プロセスを利用したTiNi合金薄膜の低温合成技術の開発
- イオン ショウシャ ト スパッタリング ノ ドウジ プロセス オ リヨウ シタ TiNi ゴウキン ハクマク ノ テイオン ゴウセイ ギジュツ ノ カイハツ
Search this article
Abstract
Sputter-deposited TiNi films had needed for a long time a post-annealing process (about 500°C) in order to have properties for shape memory alloy (SMA). A new deposition process, which incorporated simultaneous ion irradiation with multi-target RF magnetron sputtering, enabled to form crystalline TiNi films directly on a substrate at a temperature lower than 200°C. We have reported in our previous study that an SMA device was successfully fabricated on polyimide substrate without any thermal annealing. In this paper, we reveal how the energy of irradiating ion affects on lowering the optimum crystallization temperature of films. As a result, the threshold of ion energy at which crystallization comes out changes depending on plasma conditions, if the energy of irradiating ion determined only by the pulse bias voltage. However, when the energy of irradiating ion is corrected by adding the plasma potential to the bias voltage, it becomes almost constant.
Journal
-
- IEEJ Transactions on Sensors and Micromachines
-
IEEJ Transactions on Sensors and Micromachines 133 (10), B297-B300, 2013
The Institute of Electrical Engineers of Japan
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390001204461022976
-
- NII Article ID
- 10031201005
-
- NII Book ID
- AN1052634X
-
- ISSN
- 13475525
- 13418939
-
- NDL BIB ID
- 024946904
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed