マイクロ検査技術の開発

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  • Development of micro inspection mechanism
  • マイクロ ケンサ ギジュツ ノ カイハツ

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When a micromachine works in a narrow space inside of tubes and equipments such as a microfactory, a microdevice that has a visual function is indispensable. To monitor the minute shapes of microfabrication and microassembly process that are impossible to observe, inspection mechanism (environmental recognition devices) has been developed. The devices are designed to allow stereoscopic and microscopic observation and to measure the dimensions of microparts. To achieve these goals and to realize minute structures and functions, we developed a fiber-optic tactile sensor for microscopic observation, fiber-optic actuators for stereoscopic observation and tip articulation. The environmental recognition devices that integrate stereoscopic observation, tactile sensing and tip articulation mechanism have been developed. In microfactory, inspection mechanism such as measuring size of micro-gear molds fabricated by electrochemical processing and the assembly of the gear train have been confirmed using the devices.

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