High-output micro-trochoid pump fabricated by a surface treatment technique

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We developed a technique that prevents the leakage of the liquid from a channel and applied it to micro-trochoid pump. When a minute texture is formed on the interior wall of a channel and is coated by a low-surface-energy material that is much thinner than the texture, the wettability of the surface can be greatly reduced. This technique is effective in sealing liquid in a channel. And it can seal the water at a pressure difference of 18.1 kPa in a gap of 5 μm. This seal can then be used in high-output micro-trochoid pump.

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