Numerical Analysis for Evaluating Adhesion of Arbitrary-shaped Microstructures Using Optimization Method
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- Tezuka Shin-ichirou
- Yokogawa Electric Corporation
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- Kato Satoshi
- Yokogawa Electric Corporation
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- Hamanaka Hitoshi
- Yokogawa Electric Corporation
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- Watanabe Tetsuya
- Yokogawa Electric Corporation
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- Iwaoka Hideto
- Yokogawa Electric Corporation
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説明
This paper discusses a method of analyzing the adhesion problem of arbitrary-shaped microstructures using FEM and an optimization. We have applied our method to square plates, and obtained realistic curved adhesion shapes. We fabricated square plates as test samples, and calculated γs of these samples by using our method. Adhesion criteria are also derived by numerical calculation. We then redesigned the adhesion samples by applying this method, and subsequent tests showed no adhesion of the samples.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 122 (9), 427-432, 2002
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461926528
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- NII論文ID
- 130005403990
- 10009583722
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 6284165
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可