Fabrication of MEMS-driven Wire Grid Polarizers in THz Region and Evaluation of the Optical Characteristics

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  • Ishii Yuta
    Department of Finemechanics, Tohoku University
  • Nakata Yosuke
    Center for Energy and Environmental Science, Shinshu University
  • Tokizane Yu
    Tera-photonics Research Team, Terahertz-Wave Research Group, RIKEN Center for Advanced Photonics, RIKEN
  • Takida Yuma
    Tera-photonics Research Team, Terahertz-Wave Research Group, RIKEN Center for Advanced Photonics, RIKEN
  • Kanamori Yoshiaki
    Department of Finemechanics, Tohoku University
  • Minamide Hiroaki
    Tera-photonics Research Team, Terahertz-Wave Research Group, RIKEN Center for Advanced Photonics, RIKEN
  • Hane Kazuhiro
    Department of Finemechanics, Tohoku University

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Other Title
  • THz波用MEMS駆動ワイヤグリッド偏光子の製作と光学特性評価
  • THzハヨウ MEMS クドウ ワイヤグリッド ヘンコウコ ノ セイサク ト コウガク トクセイ ヒョウカ

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<p>Micro-electromechanical-systems driven wire grid polarizers (MEMS-WGPs) were proposed and fabricated. MEMS-WGPs mainly consisted of an Au cantilever array and two kinds of electrical leads. One lead was connected with cantilevers and the other lead was located under the cantilevers. Because the cantilevers were electrostatically actuated downward by applying voltage between the two leads and made contact with the next cantilever, transmittance could be changed. Static wire grid polarizers were also fabricated and measured their optical characteristics in THz region, as preliminary step toward MEMS-WGPs. MEMS-WGP was successfully fabricated and the cantilever array was electrostatically actuated. In THz region, transmittance of the fabricated MEMS-WGP was changed from 14.7% to 10.6% on average by applied voltage of 200V.</p>

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