Fabrication Technology of Ruthenium Microelectrode Pattern for RF MEMS

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  • Matsumura Takeshi
    National Institute of Information and Communications Technology (NICT), Wireless Network Research Institute, Smart Wireless Laboratory
  • Esashi Masayoshi
    Tohoku University, World Premier International Research Center, Advanced Institute for Materials Research
  • Harada Hiroshi
    National Institute of Information and Communications Technology (NICT), Wireless Network Research Institute, Smart Wireless Laboratory
  • Tanaka Shuji
    Tohoku University, Department of Nanomechanics

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Other Title
  • 高周波MEMSのためのルテニウム微小電極パターンの作製法
  • コウシュウハ MEMS ノ タメ ノ ルテニウム ビショウ デンキョク パターン ノ サクセイホウ

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Ruthenium (Ru), which is one of noble metals, has been intensively considered as an electrode material of DRAM capacitors, since Ru has high oxidation resistance and high electrical conductivity even in the oxidized state. Furthermore, Ru is also expected to be used as an electrode material of acoustic devices, e.g. FBAR, because of its superior acoustic properties such as high Young's modulus and density. For such applications, a precise etching technique for Ru microelectrode patterns is required. Ru etching proceeds by producing volatile oxidized Ru (RuO4), and is possible using plasma with O2 or O2 plus halogenous gas, e.g. Cl2 and CF4. However, the plasma etching also attacks resist and/or an underlayer of Si, SiN etc. In this study, a wet etching process with cerium (IV) ammonium nitrate (CAN)-based etchant and a dry etching process with O3 gas were investigated as low-damage Ru etching processes. O3 gas etching is better for patterning Ru microelectrodes than CAN-based wet etching. For O3 gas etching, diluted HF pretreatment is effective to reduce side etching and to improve etching uniformity

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