Uncertainty in Quantification of Binary Alloy Films and Thickness Measurement of nm Oxide Films

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  • Kim Kyung Joong
    Division of Industrial Metrology, Korea Research Institute of Standards and Science

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  • Invited, review: Uncertainty in quantification of binary alloy films and thickness measurement of nm oxide films

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Abstract

Recent activities on the quantification of alloy films and the thickness measurement of ultra-thin oxide films are reviewed in this paper. The quantification and in-depth analysis are the main applications of surface analysis methods. However, surface analyses require certified reference materials because the determinations of the film thickness and the quantities of constituent elements by surface analysis methods are not absolute. International standardization on surface chemical analysis is focused on the establishment of traceability and the reduction of the measurement uncertainty. Pilot studies and key comparisons were performed for the measurements of the thickness of nm SiO2 films and the chemical composition of binary alloy films by the surface analysis working group of the consultative committee for amount of substance.

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