Study on Air Flow Sensor Using MEMS Techniques
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- NONAKA Kohei
- Department of Mechanical Systems Engineering, Kogakuin University
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- KASHIWABARA Toshiki
- Department of Mechanical Systems Engineering, Kogakuin University
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- SUZUKI Kenji
- Department of Mechanical Systems Engineering, Kogakuin University
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- TAKANOBU Hideaki
- Department of Mechanical Systems Engineering, Kogakuin University
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- MIURA Hirofumi
- Department of Mechanical Systems Engineering, Kogakuin University
Bibliographic Information
- Other Title
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- MEMS技術を利用した気流センサの研究
- MEMS技術を利用した気流センサの研究 : 昆虫型ロボットへの搭載
- MEMS ギジュツ オ リヨウ シタ キリュウ センサ ノ ケンキュウ : コンチュウガタ ロボット エ ノ トウサイ
- —Integration into an Insect-inspired Robot—
- —昆虫型ロボットへの搭載—
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Description
This paper describes a contact-type air flow sensor inspired by crickets' sensillar seta. The sensor consists of a metal cantilever and an insulation layer. Air flow bends a hair connected to the cantilever, which causes the deflection of the cantilever and the contact with the substrate. Wind tunnel tests showed that the airflow sensors were able to detect wind velocity ranging from 0.1m/s to 1m/s depending on the length of the cantilever. A hexapod miniature robot with two airflow sensors of different lengths were fabricated using MEMS techniques. A thin brass plate was patterned and etched according to the developed shape of the robot, and the sensors were integrated on the brass plate. The plate was then folded to assemble the 3D robot body. The robot successfully walked in two different ways depending on the wind velocity.
Journal
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- Transactions of the Society of Instrument and Control Engineers
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Transactions of the Society of Instrument and Control Engineers 49 (4), 411-416, 2013
The Society of Instrument and Control Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390001204502344448
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- NII Article ID
- 10031166601
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- NII Book ID
- AN00072392
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- ISSN
- 18838189
- 04534654
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- NDL BIB ID
- 025543382
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed