書誌事項
- タイトル別名
-
- Minimizing Life Cycle Cost and Environment Load in Chilled Water Supply System for Clean Rooms in Semiconductor Manufacturing Plant
抄録
Semiconductor production lines are run all the year round and the electrical load is large. Thus their airconditioning load and operating hours are on the rise. Consequently, the operational cost accounts for a significant proportion of their production cost. Facilities that feed chilled water to cleanrooms are run for many hours, with a high loading factor, such that both their energy requirements and CO2 emissions can be cut drastically by redesigning the existing plant. This report introduces a package of energy-saving concepts that have been successfully implemented in the refrigerating plant for a cleanroom dedicated to manufacturing semiconductors to promise reduction in both the life-cycle cost (LCC) and life-cycle CO2 (LCCO2). We have found that new energysaving facilities and maintenance routines and frequencies could be optimized to reduce the LCC by 172 million yen and LCCO2 emissions by 14, 050t-C02 over a 10-year period.
収録刊行物
-
- 計測自動制御学会論文集
-
計測自動制御学会論文集 42 (10), 1168-1174, 2006
公益社団法人 計測自動制御学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390001204504146560
-
- NII論文ID
- 130003971514
-
- ISSN
- 18838189
- 04534654
-
- データソース種別
-
- JaLC
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可