半導体搬送用台車の連続時間ロバスト有限時間整定制御

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  • Continuous-time Robust Deadbeat Control of Automatic Guided Vehicle
  • ハンドウタイ ハンソウヨウダイシャ ノ レンゾク ジカン ロバスト ユウゲン ジカン セイテイ セイギョ

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This paper describes synthesis of continuous-time robust deadbeat control for automatic guided vehicle (AGV) in semiconductor manufacturing. Since the dynamics of AGV depends on the loading weight of semiconductor wafer, it is necessary to consider control synthesis which focuses on the change of the loading weight for high-accuracy positioning. In addition to this, the big overshoot and the saturating servo motor current of AGV should be avoided. Motivated by above, first, this paper provides the modeling of AGV. Second, this paper describes robust deadbeat control designs. We discuss the design of the cascade control system which is composed of the servo controller and the deadbeat one. Finally, this paper examines the effectiveness of the proposed systems through numerical examples.

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