Visualization of Spatial Profiles of Plasmas and Sputtered Atoms : Planar Magnetron Discharge and PDP Discharge

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  • Matsuda Yoshinobu
    Department of Electrical and Electronic Engineering, Nagasaki University
  • Ohtomo Koji
    Department of Electrical and Electronic Engineering, Nagasaki University
  • Ohta Hidenori
    Department of Electrical and Electronic Engineering, Nagasaki University
  • Fujiyama Hiroshi
    Department of Electrical and Electronic Engineering, Nagasaki University

Bibliographic Information

Other Title
  • プラズマとスパッタ粒子空間分布の可視化 : プレーナマグネトロン放電からPDP放電まで
  • プラズマ ト スパッタ リュウシ クウカン ブンプ ノ カシカ プレーナマグネトロン ホウデン カラ PDP ホウデン マデ

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Abstract

Experimental results of opticla emission and laser induced fluorescence measurements of plasma and sputtered atoms in the reactive sputter-deposition process of indium tin oxide films which have been used as transparent conductive electrodes in PDP, are presented. In addition, preliminary experimental reuslts of spatio-temporally resolved optical emission measuremet, which has been done recently using 3 inch AC-PDP test cell, are presented.

Journal

  • ITE Technical Report

    ITE Technical Report 24.36 (0), 13-18, 2000

    The Institute of Image Information and Television Engineers

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