Development of Solution-based Organic Coating Layer for Display : Photo active Passivation Layer for aSi TFT

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Other Title
  • ディスプレイ用塗布型有機絶縁膜の開発 : aSi TFT用感光性塗布型有機保護膜(ディスプレイ用新材料)
  • 招待講演 ディスプレイ用塗布型有機絶縁膜の開発--aSi TFT用感光性塗布型有機保護膜
  • ショウタイ コウエン ディスプレイヨウ トフガタ ユウキ ゼツエン マク ノ カイハツ aSi TFTヨウ カンコウセイ トフガタ ユウキ ホゴ マク

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Description

Recently, the size of mother glass for Liquid Crystal Display (LCD) is getting larger, and some problems such as the cost of the large vacuum equipment for Chemical Vapor Deposition (CVD) have emerged. Solution-based coating is attractive because it has a lower cost process than CVD process. We have developed a new type of the solution-based passivation layer for aSi TFTs with high reliability and processability for LCD. We describe the feature of this layer and properties of device with the layer and it's processability for aSi TFTs LCD in this paper.

Journal

  • ITE Technical Report

    ITE Technical Report 35.11 (0), 15-20, 2011

    The Institute of Image Information and Television Engineers

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