Turbomolecular Pumps for Extremely-High Vacuum.

DOI

Bibliographic Information

Other Title
  • 機械式真空ポンプ　極高真空対応ターボ分子ポンプについて

Journal

  • Turbomachinery

    Turbomachinery 23 (11), 651-656, 1995

    Turbomachinery Society of Japan

Details 詳細情報について

  • CRID
    1390001204545548928
  • NII Article ID
    130003796390
  • DOI
    10.11458/tsj1973.23.651
  • ISSN
    18802338
    03858839
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles

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