Review of MEMS Assembly Technologies in MEMS Foundry Services

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  • KATASHIRO Masahiro
    MEMS Business Development Department, MEMS Technology Division, Corporate R&D Center, Olympus Corporation

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  • ＭＥＭＳの製品化を担う実装技術　　ＭＥＭＳファンダリサービスを通じて見たＭＥＭＳ実装技術

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