書誌事項
- タイトル別名
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- Heat Flux into the Substrate and Electric Power Measurement in Radio Frequency Discharge Plasma
- コウシュウハ ホウデン プラズマ ニ オケル キバン エ ノ ネツ リュウソク ト デンリョク ソクテイ
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We performed measurement of the radio frequency power and temperature of electrodes and plasma parameters of rf discharge. The purpose of this research is checking the accuracy of the measurement of energy consumed in plasmas. The heat energy in plasma was obtained by heat flux that was calculated from substrate temperature. The temperature was measured by the laser interferometer using the LiNbO3 crystal. In the case of 2 cm and 3 cm and 4 cm electrode spacing, the heat energy toward electrodes was 7.7 W and 5.4 W and 4.0 W, respectively. The current and voltage measurement was made at the driven electrode. The input power was 8.2 W and 5.1 W and 7.7 W for the electrode spacing 2 cm and 3 cm and 4 cm, respectively. The heat energy calculating based on the electron density distribution measured was conducted by estimating the Bohm flux and ambipoler diffusion flux. It was found that the heat energy toward electrodes was 1.4 W and 1.8 W and 1.5 W for the electrode spacing 2 cm and 3 cm and, 4 cm, respectively, and the heat toward the wall was negligible.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 125 (3), 223-228, 2005
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204594659712
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- NII論文ID
- 10014490718
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 7270059
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可