Effect of Oxygen Radical in Hydrophilization Treatment of Polyimide using Ar-O<sub>2</sub> Mixture Gas Surface Wave Plasma

DOI Web Site Web Site 5 References

Bibliographic Information

Other Title
  • Ar-O<sub>2</sub>混合ガス表面波プラズマによるポリイミドの親水化処理における酸素ラジカルの効果
  • Ar-O₂混合ガス表面波プラズマによるポリイミドの親水化処理における酸素ラジカルの効果
  • Ar-O ₂ コンゴウ ガス ヒョウメンハ プラズマ ニ ヨル ポリイミド ノ シンスイカ ショリ ニ オケル サンソ ラジカル ノ コウカ

Search this article

Abstract

Hydrophilic treatment of polyimide has been investigated using Ar-O2 mixture gas surface wave plasma apparatus. As results, sufficient hydrophilic treatment has been observed in the position well away from a dielectric plate for surface wave plasma generation. Spatial distribution of electron temperature and electron density showed the rapid decrease with increasing distance from the dielectric plate. However, catalytic probe measurement of atomic oxygen radical density showed the high oxygen radical density in the position well away from the dielectric plate. Hydrophilic treatment experiment was conducted at different two positions by adjusting treatment time to accomplish same oxygen radical amount reaching. Water contact angle of these two treated sample showed good agreement. Important contribution of the atomic oxygen radical in the downstream region of surface wave plasma had been shown through the hydrophilic processing experiment of polyimide.

Journal

References(5)*help

See more

Related Projects

See more

Keywords

Details 詳細情報について

Report a problem

Back to top