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- Shimaoka Keiichi
- Toyota Central Research & Development Labs.
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- Tabata Osamu
- Toyota Central Research & Development Labs.
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- Kimura Masato
- Toyota Central Research & Development Labs.
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- Sugiyama Susumu
- Toyota Central Research & Development Labs.
Bibliographic Information
- Other Title
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- サーフェスマイクロマシーニング技術を用いたマイクロ圧力センサ
- サーフェス マイクロマシーニング ギジュツ オ モチイタ マイクロ アツリョク
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Abstract
A new micro-pressure-sensor with diaphragm size of 100μm has been fabricated by a surface micromachining technique. A circular diaphragm with 1.6μm in thickness, supported at its edge and center, was adopted to decrease the stress concentration at the diaphragm edge. The diaphragm was formed flat-structure by an etch-stop technique of a polysilicon sacrificial layer. The most suitable arrangement of piezoresistors was determined by FEM (Finite Element Method) stress analysis of the diaphragm. A pressure sensitivity of 20 μV/kPa for a pressure range from 60 to 110 kPa absolute, and a temperature coefficient of the sensitivity of -0.26% F. S./°C for a temperature range from -30 to 85°C were obtained.
Journal
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- IEEJ Transactions on Electronics, Information and Systems
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IEEJ Transactions on Electronics, Information and Systems 112 (12), 736-742, 1992
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204607833984
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- NII Article ID
- 130006843704
- 40002524758
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- NII Book ID
- AN10065950
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- ISSN
- 13488155
- 03854221
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- NDL BIB ID
- 3791183
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed