回折格子を用いた精密変位検出法

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書誌事項

タイトル別名
  • A Precision Displacement Measurement Using a Diffraction Grating
  • カイセツ コウシ オ モチイタ セイミツ ヘンイ ケンシュツホウ

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説明

A new precision displacement measuring method using a diffraction grating was investigated. In this paper, the measuring principle and the experimental results are described. The measuring principle is based on an interference phenomenon. Interference fringes are produced by superposing of a pair of positive and negative order diffraction beams obtained by illuminating the grating perpendicularly with a monochromatic light beam. The displacement of the grating causes sinusoidal change in brightness of the fringes. The displacement measurement is carried out by counting the fringes photoelectronically. Experimental system was constructed by using a reflection grating with the period of 1.43 μm and a laser diode as the monochromatic light source. The measuring performance with the precision of 0.1 μm over the range of 20 mm was confirmed in the experiment. An application to two-dimensional displacement measurement is also proposed.

収録刊行物

  • 精密機械

    精密機械 49 (6), 784-788, 1983

    公益社団法人 精密工学会

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