Non-contact Measuring Instrument of Micro-shapes with Laser Interferometer

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  • レーザ干渉計を応用した非接触微細形状測定装置
  • レーザ カンショウケイ オ オウヨウシタ ヒ セッショク ビサイ ケイジョウ

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Abstract

Non-contact measuring instrument with laser interferometer is described in this paper, which can measure the coordinates of micro-shapes on a machined surface. When laser beam in the instru- ment is focused by an objective lens of 40 × and N. A. 0.65, the measurable height of micro-shapes is less than 3. 5 μm as a main performance and the measurable inclination is less than ±5.2°. The linearity is kept between lateral (X-axis) and ver-tical (Z-axis) displacements. By using the instrument, the following shapes can be measured : cross section of roughness comparison specimen, microstep height on a silicon wafer and cross section of scratched grooves on aluminum. Their results are compared with the results measured by stylus instrument, interference microscope and scanning electron microscope. The measurement accuracy of the present instrument can be estimated better than ±5 nm in the scattered range of measured values.

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