Recognition of Base-Plate Acceleration Feedback Embedded in Stage Positioning Control System.

DOI Web Site 6 Citations 4 References
  • WAKUI Shinji
    正会員 キヤノン (株) 半導体開発センター

Bibliographic Information

Other Title
  • ステージ位置制御系における定盤加速度フィードバックの再解釈
  • ステージ イチ セイギョケイ ニ オケル ジョウバン カソクド フィードバック

Search this article

Abstract

In order to improve the positioning time of stage, base-plate acceleration feedback was proposed as described in the literature, and the effect of disturbance rejection was experimentally demonstrated. Since an explanation for the theoretical background of its feedback was insufficient, the disturbance rejection mechanism was clarified in our literature based on the mathematical model of stage including the base-plate dynamics. However, there is the question that what kind of controller can be derive by modern control theory. In this paper, the zeroing control theory, which is well-known as the disturbance rejection technique, is applied to the above mentioned mathematical model. As a result, it is clear that zeroing using the state feedback is impossible from the theoretical point of view. However, we can recognize through this examine that the base-plate acceleration feedback is equivalent to Master-Slave synchronization control. Since this analogical relationship is useful to progress the control performance, we describe the formulation and these relationship in detail.

Journal

Citations (6)*help

See more

References(4)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top