A Zone-plate Interferometer Based on a Ready-made Fizeau Interferometer.

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  • 既製のフィゾー干渉計を基礎としたゾーンプレート干渉計
  • キセイ ノ フィゾー カンショウケイ オ キソ ト シタ ゾーン プレート カ

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A zone-plate interferometer based on a Fizeau interferometer is proposed to measure shape error of mirrors with spherical and aspherical surfaces. The proposed zone-plate interferometer has zone-plates which generate the wavefronts illuminating perpendicularly to the designed surface of the mirrors. Therefore the interferometer does not need illumination lenses. An analysis of the fringe pattern is performed by the fringe scanning method, because a reference flat mirror on the interferometer and the zone-plate are independent each other. The radial error appears on the shape measurement, when a zone-plate and a mirror under test are not located on the designed position in the interferometer. The procedure for adjusting the zone-plates and mirrors under test is investigated in detail. Experimental results show that spherical and paraboidal mirrors are measured precisely by using proposed zone-plate interferometer.

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