Nanometer-scale Mechanical Processing of Muscovite Mica by Atomic Force Microscope.
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- MIYAKE Shojiro
- 正会員 日本工業大学工学部
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- ISHII Masanori
- 日本工業大学大学院
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- OTAKE Toshiaki
- 日本工業大学大学院
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- TSUSHIMA Naotake
- 日本工業大学大学院
Bibliographic Information
- Other Title
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- 原子間力顕微鏡によるマイカのナノメータスケールの機械加工
- ゲンシカンリョク ケンビキョウ ニヨル マイカ ノ ナノメータ スケール ノ
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Abstract
Atomic-scale mechanical processing of a layered crystal structure material, muscovite mica was performed using an atomic force microscope (AFM). The atomic scale processing phenomenon was evaluated from lateral force and surface atomic topographic changes caused by sliding. Above about 100 nN load, grooves were formed on the damage-free mica surface. The processing depth dependence on load was evaluated. The depth of the processed grooves increased with load. Processing lateral force estimated from the torsion of the tip beam was divided into plowing force and friction force. The plowing force is proportional to processed depth. Several cycles of mechanical sliding of the tip generated a 1-nm-deep groove by removing potassium from the surfaces which corresponded to the distance from the top surface of SiO4 to the top surface of the next SiO4 layer beneath it. A groove with four steps of one-nm depth was processed by stepwise mechanical sliding. Atomic images of each step surface of the groove corresponding to the SiO4 basal plane were observed. Then the letters NIT (scale 2000 × 600 × 1nm) was processed by mechanical tip sliding.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 63 (3), 426-430, 1997
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390001204764573696
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- NII Article ID
- 110001367797
- 10003572855
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
- http://id.crossref.org/issn/09120289
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- NDL BIB ID
- 4160131
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed