書誌事項
- タイトル別名
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- Development of Piezo-element Sensor for Touch Trigger Probe.
- 3ジゲン ソクテイキヨウ タッチ シンゴウ プローブ ノ センサ キコウ ノ カイハツ
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抄録
A touch trigger probe sensor for coordinate measuring machines (CMM) detects a contact between a spherical stylus tip and an object to be measured. The conventional probes are not suitable for high speed measurement and high accuracy measurement of sub-micrometer order. A piezo-element novel sensor construction and a detecting circuit are proposed. To detect the impulsive contact force, four piezo-elements are mounted on a base of the stylus. The impulsive force brings a longitudinal wave and a bending wave which transmit separately in the stylus. The time difference between two waves arriving to the piezo-elements enlarges the detected position error. The two waves are detected electrically by the piezo-elements and separated by the detecting circuit, and the former signal is delayed so that two waves are seemed to arrive simultaneously at the piezo-elements. By the above signal processing, the error are improved to at most 50nm dispersion, at all of the force directions in a half sphere of the spherical stylus tip for a probing speed of 3-60mm/s.
収録刊行物
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- 精密工学会誌
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精密工学会誌 66 (2), 304-308, 2000
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204764940800
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- NII論文ID
- 110001372885
- 10006915953
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 4985920
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可