Development of High Precision Mounting Robot with Fine Motion Mechanism. (1st Report). Development of Two-Axes Fine Motion Mechanism.

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  • 粗微動高精度実装ロボットの開発　１　　２軸微動機構の開発
  • ソビドウ コウ セイド ジッソウ ロボット ノ カイハツ ダイ1ポウ 2ジク ビドウ キコウ ノ カイハツ
  • Development of Two-Axes Fine Motion Mechanism
  • 2軸微動機構の開発

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Abstract

A high precision mounting robot system consisting of SCARA robot and fine motion mechanism attached to the end effector of the robot is being developed by authors, This paper introduces basic concept and design specification of the system, and describes the design and capability of developed X-Y axes fine motion mechanism for this purpose in details. Developed fine motion mechanism is composed of piezo-electric actuator and displacement magnifying mechanism with elastic hinge. Detailed structure of the mechanism is designed by simulation based on FEM. Experimental results of positioning show the effectiveness of developed fine motion mechanism.

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