書誌事項
- タイトル別名
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- Preparation of High Lubricious and Hard Sputtered Films with TiN+MoS<sub>2</sub> Composite Target and Improvement of Their Adhesive Strength
- TiN+MoS₂複合ターゲットを用いた高潤滑性硬質スパッタ膜の創成とその密着性の改善
- TiN+MoS ₂ フクゴウ ターゲット オ モチイタ コウジュンカツセイ コウシツ スパッタマク ノ ソウセイ ト ソノ ミッチャクセイ ノ カイゼン
- Preparation of High Lubricious and Hard Sputtered Films with TiN+MoS2 Composite Target and Improvement of Their Adhesive Strength
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抄録
TiN films are superior in hardness and adhesive strength. However, friction coefficients of the TiN films are higher than those of DLC films. By adding molybdenum disulfide (MoS2) up to 40%, the TiN-MoS2 composite films with very low frictional properties could be obtained. In this study, the authors tried to reduce MoS2 content in the high lubricious TiN-MoS2 composite films by using a composite target of TiN and MoS2 for improving the hardness. In addition, Ti interlayer was deposited in order to improve the adhesive strength. The friction coefficient of the composite film with MoS2 content of 22% showed low friction coefficient which was almost equal to that of DLC film at room temperature and 200°C. The hardness of the newly developed high lubricious composite film was as high as 17GPa. In addition, the adhesive strength of the composite film was improved by forming the Ti interlayer.
収録刊行物
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- 精密工学会誌
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精密工学会誌 78 (3), 241-245, 2012
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204796364544
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- NII論文ID
- 130002122194
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 023578684
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
