High Precision Optical Surface Sensor (HIPOSS-1) - Studies on ultra-precision measuring technology.
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- OZAWA Norimitsu
- 正会員 機械技術研究所
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- KOHNO Tsuguo
- 正会員 金沢大学工学部
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- MITSUI Kimiyuki
- 正会員 機械技術研究所
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- MUSYA Tohru
- オリンパス光学工業(株)
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- MIYAMOTO Kozo
- 正会員 (株)小坂研究所
Bibliographic Information
- Other Title
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- 非接触光学式微細形状測定ヘッド(HIPOSS‐1) 超精密測定技術の研究
- ヒ セッショク コウガクシキ ビサイ ケイジョウ ソクテイ ヘッド HIPOS
- Studies on Ultra-precision Measuring Technology
- 超精密測定技術の研究
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Abstract
Although stylus profilometers are now widely used, recent development of single point diamond turning and semiconductor technology strongly require to come out non-contact precise surface sensors. This is mainly because the stylus may scratch the surface of soft metal, thin film, silicon wafer, and so forth. Some non-contact surface measurement methods have been developed. Most of them, however, are complex, expensive, too large, low resolution, or simply hard to handle. Applying the principle of focus detection by critical angle of total reflection, a practical non-contact sensor to measure the surface roughness or the micro-figure of diamond turned metal mirror is developed and named HIPOSS-1 (HIgh Precision Optical Surface Sensor-1). HIPOSS-1 shows 20 nm resolution about vertical direction and is so compact and light weight. And it is interchangeable to a pick-up head of stylus profiling instrument.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 52 (12), 2080-2086, 1986
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001204797364224
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- NII Article ID
- 110001368674
- 10002972719
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 3113251
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed