Y<sub>2</sub>O<sub>3</sub>, ZrO<sub>2</sub> and Stabilized ZrO<sub>2</sub> Films Prepared by Chemical Vapor Deposition

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  • KAMATA Kiichiro
    Department of Materials Science and Technology, Technologycal University of Nagaoka
  • MATSUMOTO Shigeki
    Department of Materials Science and Technology, Technologycal University of Nagaoka
  • SHIBATA Yoshishige
    Department of Materials Science and Technology, Technologycal University of Nagaoka

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  • CVD法によるY<sub>2</sub>O<sub>3</sub>, ZrO<sub>2</sub>及び安定化ZrO<sub>2</sub>薄膜の合成
  • CVDホウ ニヨル Y2O3 ZrO2 オヨビ アンテイカ ZrO2 ハクマク

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記事分類: 化学・化学工業--無機化学・無機化学工業--非金属元素・非金属化合物--セラミックス

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