書誌事項
- タイトル別名
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- Problem of Gas Dose with Micro-Capillary Array
- キャピラリー アレイ オ モチイタ ガスドーズ ニ オケル モンダイテン
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抄録
We have developed a Micro-Capillary-Array (MCA) Beam Doser in order to dose a collimated molecular beam. Whereas the response of the chamber pressure was fast in the dosage of N2, D2 and Ar, the pressure response to the NO dosage was slow with a delay of about 5 s. When gases pass through an MCA with a large length to radius ratio as a free molecular flow, they repeatedly collide with the MCA walls. It was found that gases that have a small residence time (τ) pass through the MCA without substantial delay. On the other hand, those with large τ reveal a delayed flow, and it takes a few seconds to attain a steady-state flow.<br>
収録刊行物
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 52 (3), 141-144, 2009
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001205295140352
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- NII論文ID
- 10024897857
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- NII書誌ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 10256368
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可