軸対称透過形電離真空計の感度係数のばらつきと安定性

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  • Characteristics of the Axial-symmetric Transmission Gauge: Deviation and Long Term Stability of Sensitivity Factor
  • ジク タイショウ トウカガタ デンリ シンクウケイ ノ カンド ケイスウ ノ バラツキ ト アンテイセイ

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  The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.<br>

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