Characteristics of the Axial-symmetric Transmission Gauge: Deviation and Long Term Stability of Sensitivity Factor
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- TAKAHASHI Naoki
- ULVAC Inc.
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- YUYAMA Junpei
- ULVAC Inc.
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- TUZI Yutaka
- ULVAC Inc.
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- ARAKAWA Ichiro
- Department of Physics, Gakushuin Univ.
Bibliographic Information
- Other Title
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- 軸対称透過形電離真空計の感度係数のばらつきと安定性
- ジク タイショウ トウカガタ デンリ シンクウケイ ノ カンド ケイスウ ノ バラツキ ト アンテイセイ
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Abstract
The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (6), 377-381, 2008
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390001205295794688
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- NII Article ID
- 10021157695
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 9571163
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed