書誌事項
- タイトル別名
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- Characteristics of the Axial-symmetric Transmission Gauge: Deviation and Long Term Stability of Sensitivity Factor
- ジク タイショウ トウカガタ デンリ シンクウケイ ノ カンド ケイスウ ノ バラツキ ト アンテイセイ
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The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.<br>
収録刊行物
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (6), 377-381, 2008
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001205295794688
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- NII論文ID
- 10021157695
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- NII書誌ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 9571163
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可