Ultra-precision Air-pin Sensor and its Dynamic characteristic research

DOI
  • Hui Zhang
    Dept. of Precision Instrument, Hefei University of Technology
  • Shan Chen
    Dept. of Precision Instrument, Hefei University of Technology
  • Shanxi Deng
    Dept. of Precision Instrument, Hefei University of Technology
  • Huiqing Wang
    Dept. of Precision Instrument, Hefei University of Technology

説明

Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10μm in the measurement range, and its measurement accuracy is better than 0.1μm, and its response time is less 10ms.

収録刊行物

キーワード

詳細情報 詳細情報について

  • CRID
    1390001205585580544
  • NII論文ID
    130006960458
  • DOI
    10.11499/sicep.2002.0.475.0
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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