Solid-State Electrochemical Machining of Inorganic Materials using Oxide Ion Conductor

Bibliographic Information

Other Title
  • 酸化物イオン伝導体を利用した無機固体材料の表面加工

Description

A novel solid state electrochemical micromachining of metal plates with a high melting temperature was performed using an oxide ion conductor. The fundamental solid electrochemical cell consists of an anode metal (W or Mo) / pyramidal NiO-YSZ / cathode system, where the contact diameter between metal and NiO-YSZ was extremely small (- a few μm). Under applying an electric field at high temperature, the metal substrate was electrochemically oxidized by reacting with O2- at the metal / NiO-YSZ microcontact, and then the produced metal oxide at the microcontact was readily evaporated under an inert atmosphere. As a result of continuous electrolysis, the metal substrate was locally consumed at the microcontact, and thus solid state electrochemical micromachining was accomplished.

Journal

Details 詳細情報について

  • CRID
    1390001205617824256
  • NII Article ID
    130006975989
  • DOI
    10.14853/pcersj.2008s.0.3f18.0
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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