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A nonlinear system identification of the inpedance matching system for the plasma chamber in the semi-conductor production
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- Hasegawa Youhei
- Osaka University
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- Kaneko Osamu
- Osaka University
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- Matsumoto Kazuyuki
- Osaka University
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- Fujii Takao
- Osaka University
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- Fujii Shuuictsu
- ADTEC Plasma Technology Co.,Ltd.
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- Imai Mitsuhiro
- ADTEC Plasma Technology Co.,Ltd.
Bibliographic Information
- Other Title
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- 半導体プラズマチャンバー用インピーダンスマッチングシステムの非線形同定
Description
In this talk, we present results on nonlinear system identification of the inpedance matching system for the plasma chamber in the semi-conductor production.We apply the mimimum norm method (which is abbreviated as MN) that is appropriate for identification of the system described by the series of linear dynamical and nonlinear static parts.
Journal
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- Proceedings of the Annual Conference of the Institute of Systems, Control and Information Engineers
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Proceedings of the Annual Conference of the Institute of Systems, Control and Information Engineers SCI06 (0), 151-151, 2006
The Institute of Systems, Control and Information Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390001205623323008
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- NII Article ID
- 130004667757
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed
