Study on Effect of Dressing Method on Pad Surface Characteristics in Polishing Technique

DOI

Bibliographic Information

Other Title
  • ポリシングにおけるドレス条件がパッド表面性状に及ぼす影響に関する研究
  • Effect of Dressing Time on Pad Surface Characteristics
  • ドレス時間がパッド表面性状に及ぼす影響

Abstract

In this study, we aim to present the effective parameters that can be used to evaluate pad surface conditions. Therefore, we proposed the contact image analysis method using image rotation prism. Our previously reports showed the fundamental results obtained by both the laboratory apparatus and the commercially available apparatus. This paper presented the detail of selection methodology of threshold level for image analysis, and the evaluated results about the effect of dressing time on pad surface characteristics. As the results, we found that (1) the contact ratio, (2) number of contact points and (3) contact point interval were found to be effective for evaluating pad surface conditions.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390001205651474944
  • NII Article ID
    130004659089
  • DOI
    10.11522/pscjspe.2009a.0.319.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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