FIB Milling of Glassy Carbon Mold and Its Application to Hot–Embossing of Glass Channel

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Bibliographic Information

Other Title
  • FIB加工によるGC型の製作とホットエンボス成形によるガラス基盤への応用

Abstract

The purpose of this study is to fabricate a glass channel using both focused ion beam (FIB) milling and hot–embossing. For application to design of mold part using FIB milling, the relationship between the FIB milling conditions and the milled depth was investigated. GC molds before and after heat–treatment were then used for the thermal–imprint of glasses (Pyrex glass and quartz glass) to fabricate the sample part of pressure drop/pulse attenuator. The replication results (The 2–㎛–wide channel pattern) show that the processing conditions investigated here were available for channel parts replication using thermal–imprint in terms of the dimension accuracy and surface roughness.

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Details 詳細情報について

  • CRID
    1390001205653673472
  • NII Article ID
    130005027576
  • DOI
    10.11522/pscjspe.2006s.0.735.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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