革新的CMP/P-CVM融合装置の設計・試作(第4報)
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- Shiozawa Kousuke
- Department of Precision Science and Technology, Graduate School of Engineering
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- Sano Yasuhisa
- Department of Precision Science and Technology, Graduate School of Engineering
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- Doi Toshiro
- Art, Science and Technology Center for Cooperative Research
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- Syuhei Kurokawa
- Department of Mechanical Engineering, Graduate School of Engineering, Kyushu University
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- Aida Hideo
- NJC Institute of Technology
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- Miyashita Tadakazu
- R&D Department
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- Sumizawa Haruo
- R&D Department
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- Yamauchi Kazuto
- Department of Precision Science and Technology, Graduate School of Engineering
Bibliographic Information
- Other Title
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- A-type装置による炭化ケイ素を加工対象とした平坦化特性の評価
Abstract
我々は機械加工と大気圧雰囲気下におけるプラズマエッチング(Plasma Chemical Vaporization Machining; PCVM)を融合させた高効率な平坦化を提案している.前報(第2報)では機械加工とPCVMを交互に行う装置の試作とその融合加工法の原理検証を行った.本報では,加工対象である炭化ケイ素に対して融合加工を繰り返し行い,その繰り返し回数と表面形状の関係について報告する.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2014A (0), 15-16, 2014
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390001205657773312
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- NII Article ID
- 130005479232
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed