Multiple-electrode system for non-destructive evaluation of ultra-thin oxide
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- Fukashi Junpei
- 熊本大
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- Furuta Masaaki
- 熊本大
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- Kubota Hiroshi
- 熊本大
Bibliographic Information
- Other Title
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- マルチ電極システムによるゲート絶縁薄膜の非破壊評価
Abstract
In previous study, we developed a technique to evaluate the electrical conductivity of the whole gate insulator of a 12-inch Si wafer using a non-destructive and non-contact pulse photo-conductivity method. But, the time duration of measuring just 170 points on the specimen was very long due to one single probe in our system and a slow move of the stage. We have, then, developed a multiple-electrode system with 100 electrodes and multiple-flash lamp for a faster evaluation. This system is necessary for mass production of semiconductor devices.
Journal
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- Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
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Record of Joint Conference of Electrical and Electronics Engineers in Kyushu 2013 (0), 178-178, 2013
Committee of Joint Conference of Electrical, Electronics and Information Engineers in Kyushu
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Details 詳細情報について
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- CRID
- 1390001205664421248
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- NII Article ID
- 130005487319
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed