- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Knowledge Graph Search feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
A new design of semiconductor Process/Device simulation and It's Effects to Production Flow
-
- Asai Makoto
- OMRON Corporation
Bibliographic Information
- Other Title
-
- 半導体プロセス・デバイスシミュレーションの自作と業務への利用効果
Description
A new process & device simulation was designed for semiconductor production process flow.The equations were defined by considering the physical data.Simulation models were defined by help of the actual information on the cross section sturucture of IC and IC characteristic.This technique reduces the time that is spent for experiments and help to detect problems that occured during the process flow.In this way,production effciency is succesfully improved.
Journal
-
- Proceedings of the Conference of Transdisciplinary Federation of Science and Technology
-
Proceedings of the Conference of Transdisciplinary Federation of Science and Technology 2007 (0), 92-92, 2007
Transdisciplinary Federation of Science and Technology
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390001205667036544
-
- NII Article ID
- 130004651648
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- CiNii Articles
-
- Abstract License Flag
- Disallowed
