ZnSe系ヘテロエピタキシャル結晶の格子歪と界面特性(<特集>バルク結晶の成長(II))

書誌事項

タイトル別名
  • Lattice Strain and Interface Properties of ZnSe-Based Heteroepitaxial Crystals (<Special Issue> Bulk Crystal Growth(II))
  • ZnSe系ヘテロエピタキシャル結晶の格子歪と界面特性
  • ZnSeケイ ヘテロエピタキシャル ケッショウ ノ コウシ ヒズミ ト カイメ

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説明

ZnSe-based heteroepitaxial crystals are grown on III-V substrates, mainly on GaAs, because II-VI wafers with high quality and large area are hardly obtained. The heteroepitaxial crystals include two-dimensional elastic strains due to mismatches of lattice constant and thermal expansion coefficient. The strains in ZnSe layers on GaAs substrate measured with X-ray diffraction are described as a function of temperature for different layer thicknesses. The stress at the heterointerface is also estimated from energy shift of Cr^<2+> luminescence in GaAs substrate. The two-dimensional strain changes symmetry of the crystal lattice and energy band structure. The band structure of strained layers are studied by low-temperature reflectance spectra. The electrical properties of ZnSe/GaAs hetero-interface and influences of substrate-surface treatment are also discussed.

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