Numerical Simulation of High Pressure LEG Crystal Growth(<Special Issue>Bulk Crystal Growth)
-
- Ishida Masanobu
- Mitsubishi Kasei Corporation, Research Center
-
- Yamaguchi Yukio
- Mitsubishi Kasei Corporation, Research Center
-
- Orito Fumio
- Mitsubishi Kasei Corporation, Research Center
Bibliographic Information
- Other Title
-
- 高圧LEC成長炉内の解析(<特集>バルク成長)
- 高圧LEC成長炉内の解析
- コウアツ LEC セイチョウロナイ ノ カイセキ
Search this article
Abstract
A numerical model has been made to determine the effect of various geometric and thermal variables. The model consists of the following three blocks: (1) the entire furnace system in which entire temperature distributions were calculated considering the effects of radiative heat exchange and gas flow; (2) a crystal and melt system in which temperature distributions and the crystal/melt interface were calculated; (3) thermal stress analysis by which resolved shear stress is obtained. Calculated results were in good agreement with experimental results; the temperature response to the change of heater power, the crystal/melt interface shape which was observed from growth striations and etch-pit densities on 4 inch diameter (100) oriented GaAs wafers.
Journal
-
- Journal of the Japanese Association for Crystal Growth
-
Journal of the Japanese Association for Crystal Growth 17 (3-4), 284-289, 1991
The Japanese Association for Crystal Growth
- Tweet
Details 詳細情報について
-
- CRID
- 1390001205864547584
-
- NII Article ID
- 110002769509
-
- NII Book ID
- AN00188386
-
- ISSN
- 21878366
- 03856275
-
- NDL BIB ID
- 3701002
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- CiNii Articles
-
- Abstract License Flag
- Disallowed