書誌事項
- タイトル別名
-
- Numerical Simulation of High Pressure LEG Crystal Growth(<Special Issue>Bulk Crystal Growth)
- 高圧LEC成長炉内の解析
- コウアツ LEC セイチョウロナイ ノ カイセキ
この論文をさがす
抄録
A numerical model has been made to determine the effect of various geometric and thermal variables. The model consists of the following three blocks: (1) the entire furnace system in which entire temperature distributions were calculated considering the effects of radiative heat exchange and gas flow; (2) a crystal and melt system in which temperature distributions and the crystal/melt interface were calculated; (3) thermal stress analysis by which resolved shear stress is obtained. Calculated results were in good agreement with experimental results; the temperature response to the change of heater power, the crystal/melt interface shape which was observed from growth striations and etch-pit densities on 4 inch diameter (100) oriented GaAs wafers.
収録刊行物
-
- 日本結晶成長学会誌
-
日本結晶成長学会誌 17 (3-4), 284-289, 1991
日本結晶成長学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001205864547584
-
- NII論文ID
- 110002769509
-
- NII書誌ID
- AN00188386
-
- ISSN
- 21878366
- 03856275
-
- NDL書誌ID
- 3701002
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDL
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可